A1 Journal article (refereed), original research

Development of a Vertically Configured MEMS Heat Flux Sensor

Open Access hybrid publication

Publication Details
Authors: Immonen Antti, Levikari Saku, Gao Feng, Silventoinen Pertti, Kuisma Mikko
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Publication year: 2020
Language: English
Related Journal or Series Information: IEEE Transactions on Instrumentation and Measurement
ISSN: 0018-9456
eISSN: 1557-9662
JUFO-Level of this publication: 2
Open Access: Open Access hybrid publication


Heat flux sensors have potential in enabling applications that require direct and instantaneous tracking of thermal energy transfer. To facilitate widespread use of the sensors, the sensors have to be robust and feasible to implement, while maintaining high sensitivity, fast response time, and low thermal obtrusiveness. However, most currently available heat flux sensors are either challenging to manufacture or ill-suited for surface heat flux measurement because of their mechanical or thermal characteristics.
In this paper, the design of a novel MEMS heat flux sensor structure intended for surface heat flux measurements is presented. A prototype batch is manufactured and the electrical performance of the prototype sensors is compared with commercially available heat flux sensors. Results show that sensors with a similar sensitivity as commercial sensors can be made by using MEMS methods.

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Last updated on 2021-01-02 at 09:45