A4 Conference proceedings

MEMS Heat Flux Sensor

Publication Details
Authors: Immonen Antti, Levikari Saku, Gao Feng, Kuisma Mikko, Silventoinen Pertti
Publication year: 2020
Language: English
Title of parent publication: IEEE Instrumentation and Measurement Technology Conference (I2MTC 2020), 2020 Conference Proceedings
ISBN: 978-1-7281-4460-3
JUFO-Level of this publication: 1
Open Access: Not an Open Access publication
Location of the parallel saved publication: https://arxiv.org/pdf/2006.02808


Heat flux sensors have potential in enabling applications that require tracking of direct and instantaneous thermal energy transfer. To facilitate their use, the sensors have to be robust and feasible to implement, while maintaining high sensitivity and a fast response time. However, most commercially available heat flux sensors are expensive to manufacture and have insufficient temporal responses. In this paper, a novel microelectromechanical heat flux sensor structure is proposed. The electrical performance of the prototype sensors is compared with commercially available heat flux sensors. Preliminary results show that our sensors have similar sensitivity and faster response compared to commercial sensors.

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Last updated on 2020-08-09 at 16:18